Comprehensive studies of the quality of components present in monosilane synthesis technology using analytical instruments

Ротштейн, В.М., Ашуров, Х.Б., Ашуров, Р.Х.

O‘zbekiston fizika jurnali · 2020-yil

Annotatsiya

Complex qualitative and quantitative studies of the initial product, ethanol, used in the technological process for monosilane synthesis are carried out. Monosilane is subsequently used to obtain nanocrystalline silicon by thermal and ion-plasma decomposition of monosilane. The methods of gas chromatography-mass spectrometry, Raman spectrometry and infrared spectrometry are presented and the results obtained in complex studies are presented. The possibility of performing a quantitative and qualitative analysis of ethanol samples by Raman spectrometry and infrared spectrometry (IR) was demonstrated by studying the integral intensities of the C-H spectral bands in the Raman spectra and IR spectra in the range of 2650−3050 cm−1 are responsible for the presence of ethanol, as well as the spectral bands of hydroxyl groups O-H in the range 3000−3700 cm−1 , which are responsible for the presence of water in the samples under study.

Maqola ma’lumotlari
MualliflarРотштейн, В.М., Ашуров, Х.Б., Ашуров, Р.Х.
JurnalO‘zbekiston fizika jurnali
Nashr sanasi2020-09-21
Jild22
Son5
Betlar314-324
TilRus
DOI10.52304/.v22i5.197

Kalit so‘zlar

этанол, комбинационное рассеяние, Фурье спектроскопия, моносилан, хромато-масс-спектрометрия., ethanol, MSD, FTIR, monosilane, chromatography-mass spectrometry

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