The method of express-analysis of triethoxysilane and tetraethoxysilane, which are intermediate products of chemical reactions occurring in the framework of the silane technology for the synthesis of polycrystalline silicon, is described. To form the method, we used the data of preliminary studies of triethoxysilane and tetraethoxysilane obtained using a MSD 5975C-GC 7890A gas chromatography-mass spectrometer. The immediate implementation of the expressanalysis of triethoxysilane and tetraethoxysilane was carried out on an Agilent Technologies Cary 640 Series FTIR Spectrometer. At the same time, quantitative express-analysis, without the need of the presence of standards, was carried out on the basis of a calibration curve obtained from the corresponding results of gas chromatography-mass spectrometric studies
| Mualliflar | Ротштейн, В.М., Ашуров, Х.Б., Ашуров, Р.Х. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashr sanasi | 2021-12-27 |
| Jild | 23 |
| Son | 3 |
| Betlar | 70-75 |
| Til | Rus |
| DOI | 10.52304/.v23i3.267 |
DOI: 10.52304/.v23i3.267 · Maqolaning asl sahifasi
градуировочный график, тетраэтоксисилан, триэтоксисилан, инфракрасная спектроскопия, хромато-масс-спектрометрия, calibration curve, tetraethoxysilane, triethoxysilane, infrared spectroscopy, chromatography-mass spectrometry
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