Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition

Клечковская, В.В., Рысбаев, А.С., Камилов, Т.С., Бекпулатов, И.Р., Игамов, Б.Д., Турапов, И.Х.

O‘zbekiston fizika jurnali · 2021-yil

Annotatsiya

In this work, thin films of Mn4Si7 were grown by the methods of magnetron and laser sputtering of bulk manganese silicide Mn4Si7 on the surface of various substrates (Si, SiO2, sitall, and mica), the optimal modes of film formation were determined, which ensure high values of thermoelectric characteristics. In addition, the surface morphology, crystal structure, and elemental composition of the obtained films were investigated. It was found that the thermoelectric power of films of higher manganese silicide during the transition from the amorphous state to the nanocrystalline state increases, which is explained by the selective scattering of charge carriers at the boundaries of nanoclusters. It was also shown that the highest conversion coefficient is possessed by higher manganese silicide films grown on a mica substrate, which is associated with the low thermal conductivity of mica. Films on SiO2 have a lower conversion coefficient, but they have a high speed of response, and films on mica and sitall have a high sensitivity, and therefore they can be used in detectors of thermal radiation of IR waves.

Maqola ma’lumotlari
MualliflarКлечковская, В.В., Рысбаев, А.С., Камилов, Т.С., Бекпулатов, И.Р., Игамов, Б.Д., Турапов, И.Х.
JurnalO‘zbekiston fizika jurnali
NashriyotЎзбекистон Республикаси Фанлар академияси
ISSN1025-8817, 2181-077X
Nashr sanasi2021-12-27
Jild23
Son3
Betlar43-46
TilIngliz
Ilmiy sohaFizika-matematika
DOI10.52304/.v23i3.263
Indeksga qo‘shilgan2026-08-26

DOI: 10.52304/.v23i3.263 · Maqolaning asl sahifasi

Kalit so‘zlar

морфология поверхности, коэффициент термоэдс, магнетронное распыление, пленки высшего силицида марганца (ВСМ), удельное сопротивление, лазерное нанесение пленок, surface morphology, thermoelectric coefficient, thermoelectric force, resistivity, laser deposition of films, magnetron sputtering, films of higher manganese silicide (HMS)

Ilmiy soha

Fizika-matematika

Iqtibos keltirish

APAКлечковская, В.В., Рысбаев, А.С., Камилов, Т.С., Бекпулатов, И.Р., Игамов, Б.Д., & Турапов, И.Х. (2021). Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition. O‘zbekiston fizika jurnali, 23(3), 43-46. https://doi.org/10.52304/.v23i3.263
GOST (OAK)Клечковская, В.В. va b. Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition // O‘zbekiston fizika jurnali. – 2021. – T. 23, № 3. – P. 43-46. – DOI: 10.52304/.v23i3.263.
MLAКлечковская, В.В., Рысбаев, А.С., Камилов, Т.С., Бекпулатов, И.Р., Игамов, Б.Д., and Турапов, И.Х. “Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition.” O‘zbekiston fizika jurnali, 23(3), 43-46, 2021. https://doi.org/10.52304/.v23i3.263
ChicagoКлечковская, В.В., Рысбаев, А.С., Камилов, Т.С., Бекпулатов, И.Р., Игамов, Б.Д., and Турапов, И.Х. “Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition.” O‘zbekiston fizika jurnali, 23(3), 43-46 (2021). https://doi.org/10.52304/.v23i3.263
HarvardКлечковская, В.В., Рысбаев, А.С., Камилов, Т.С., Бекпулатов, И.Р., Игамов, Б.Д., and Турапов, И.Х (2021) ‘Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition’, O‘zbekiston fizika jurnali, 23(3), 43-46. https://doi.org/10.52304/.v23i3.263
BibTeX
@article{article2021,
  title = {Formation of Mn4Si7 Thin Films on Various Substrates by Magnetron Sputtering and Pulsed Laser Deposition},
  author = {Клечковская, В.В. and Рысбаев, А.С. and Камилов, Т.С. and Бекпулатов, И.Р. and Игамов, Б.Д. and Турапов, И.Х.},
  journal = {O‘zbekiston fizika jurnali},
  year = {2021},
  volume = {23},
  number = {3},
  pages = {43-46},
  doi = {10.52304/.v23i3.263},
  url = {https://doi.org/10.52304/.v23i3.263}
}

Boshqa maqola uchun iqtibos tayyorlash

O‘zbekiston fizika jurnali jurnalidan boshqa maqolalar

O‘zbekiston fizika jurnali — barcha maqolalar · 2021-yil arxivi

Клечковская, В.В. — boshqa maqolalari

Fizika-matematika sohasidagi boshqa maqolalar

Fizika-matematika sohasidagi OAK jurnallari