The experimental results of measuring the yield of secondary ions and neutral calcium atoms under the bombardment of a CaCO3 target with cluster ions Bim + (m = 1−5) in the energy range 1−10 keV have been presented. Atomic calcium ions predominated in the mass spectra of secondary ionic emission of the CaCO3 target. This circumstance is associated with low ionization potentials of calcium atoms and, accordingly, high ionization efficiency under sputtering. The yields of secondary ions and neutral calcium atoms are calculated under the bombardment of a CaCO3 target with cluster ions Bim + (m = 1−5) in the energy range 1−10 keV. It was revealed that, in comparison with the yield of secondary calcium ions, a more pronounced non-additive rise of neutral atoms with an increase in the number of atoms in bombarding cluster ions is observed
| Mualliflar | Ахунов, Ш.Дж., Усманов, Д.Т. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashriyot | Ўзбекистон Республикаси Фанлар академияси |
| ISSN | 1025-8817, 2181-077X |
| Nashr sanasi | 2021-02-15 |
| Jild | 22 |
| Son | 6 |
| Betlar | 350-355 |
| Til | Ingliz |
| Ilmiy soha | Fizika-matematika |
| DOI | 10.52304/.v22i6.206 |
| Indeksga qo‘shilgan | 2026-08-26 |
DOI: 10.52304/.v22i6.206 · Maqolaning asl sahifasi
вторично-ионная масс-спектрометрия, кластерный ион, ионный источник Bim , неаддитивные эффекты, поверхностная ионизация., secondary ion mass spectrometry, cluster ion, ion source of Bim , non-additive effects, surface ionization.
| APA | Ахунов, Ш.Дж., & Усманов, Д.Т. (2021). Sputtering a CaCo3 target under bombardment with Bim + cluster ions. O‘zbekiston fizika jurnali, 22(6), 350-355. https://doi.org/10.52304/.v22i6.206 |
|---|---|
| GOST (OAK) | Ахунов, Ш.Дж., Усманов, Д.Т. Sputtering a CaCo3 target under bombardment with Bim + cluster ions // O‘zbekiston fizika jurnali. – 2021. – T. 22, № 6. – P. 350-355. – DOI: 10.52304/.v22i6.206. |
| MLA | Ахунов, Ш.Дж., and Усманов, Д.Т. “Sputtering a CaCo3 target under bombardment with Bim + cluster ions.” O‘zbekiston fizika jurnali, 22(6), 350-355, 2021. https://doi.org/10.52304/.v22i6.206 |
| Chicago | Ахунов, Ш.Дж., and Усманов, Д.Т. “Sputtering a CaCo3 target under bombardment with Bim + cluster ions.” O‘zbekiston fizika jurnali, 22(6), 350-355 (2021). https://doi.org/10.52304/.v22i6.206 |
| Harvard | Ахунов, Ш.Дж., and Усманов, Д.Т (2021) ‘Sputtering a CaCo3 target under bombardment with Bim + cluster ions’, O‘zbekiston fizika jurnali, 22(6), 350-355. https://doi.org/10.52304/.v22i6.206 |
| BibTeX | @article{article2021,
title = {Sputtering a CaCo3 target under bombardment with Bim + cluster ions},
author = {Ахунов, Ш.Дж. and Усманов, Д.Т.},
journal = {O‘zbekiston fizika jurnali},
year = {2021},
volume = {22},
number = {6},
pages = {350-355},
doi = {10.52304/.v22i6.206},
url = {https://doi.org/10.52304/.v22i6.206}
} |
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