The experimental setup is up graded to expand the range of primary ion masses, and Cm −, Sim −, SimOn − and NimCln − cluster ion sources were developed. A study of secondary ion emission of silicon during bombardment with these ions in the energy range of 6-21 keV has been performed. It is shown that with an increase in the number of atoms in primary clusters, there is a pronounced nonadditive increase in the yield of secondary ions, both under the influence of heavy and relatively light cluster ions. The obtained results clarify the ideas about the nonlinearity of ion sputtering processes in the field of low energies and masses of cluster ions.
| Mualliflar | Ахунов, Ш.Дж., Ахмедов, Ш.М., Усманов, Д.Т. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashriyot | Ўзбекистон Республикаси Фанлар академияси |
| ISSN | 1025-8817, 2181-077X |
| Nashr sanasi | 2026-10-22 |
| Jild | 28 |
| Son | 3 |
| Til | Ingliz |
| Ilmiy soha | Fizika-matematika |
| DOI | 10.52304/.v28i3.664 |
| Indeksga qo‘shilgan | 2026-10-23 |
DOI: 10.52304/.v28i3.664 · Maqolaning asl sahifasi
вторичная ионная эмиссия, кластерные ионы, распыление кремния, полиатомные ионы, неаддитивные эффекты, нелинейность процессов, secondary ion emission, cluster ions, silicon sputtering, polyatomic ions, nonadditive effects, nonlinearity of processes
| APA | Ахунов, Ш.Дж., Ахмедов, Ш.М., & Усманов, Д.Т. (2026). Experimental study of secondary ion emission of silicon bombarded with cluster ions SimOn − and NimCln −. O‘zbekiston fizika jurnali, 28(3). https://doi.org/10.52304/.v28i3.664 |
|---|---|
| GOST (OAK) | Ахунов, Ш.Дж., Ахмедов, Ш.М., Усманов, Д.Т. Experimental study of secondary ion emission of silicon bombarded with cluster ions SimOn − and NimCln − // O‘zbekiston fizika jurnali. – 2026. – T. 28, № 3. – DOI: 10.52304/.v28i3.664. |
| MLA | Ахунов, Ш.Дж., Ахмедов, Ш.М., and Усманов, Д.Т. “Experimental study of secondary ion emission of silicon bombarded with cluster ions SimOn − and NimCln −.” O‘zbekiston fizika jurnali, 28(3), 2026. https://doi.org/10.52304/.v28i3.664 |
| Chicago | Ахунов, Ш.Дж., Ахмедов, Ш.М., and Усманов, Д.Т. “Experimental study of secondary ion emission of silicon bombarded with cluster ions SimOn − and NimCln −.” O‘zbekiston fizika jurnali, 28(3) (2026). https://doi.org/10.52304/.v28i3.664 |
| Harvard | Ахунов, Ш.Дж., Ахмедов, Ш.М., and Усманов, Д.Т (2026) ‘Experimental study of secondary ion emission of silicon bombarded with cluster ions SimOn − and NimCln −’, O‘zbekiston fizika jurnali, 28(3). https://doi.org/10.52304/.v28i3.664 |
| BibTeX | @article{article2026,
title = {Experimental study of secondary ion emission of silicon bombarded with cluster ions SimOn − and NimCln −},
author = {Ахунов, Ш.Дж. and Ахмедов, Ш.М. and Усманов, Д.Т.},
journal = {O‘zbekiston fizika jurnali},
year = {2026},
volume = {28},
number = {3},
doi = {10.52304/.v28i3.664},
url = {https://doi.org/10.52304/.v28i3.664}
} |
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