This study comprehensively investigates the effect of thermal annealing on the morphological and structural properties of Sb2Se3 thin films obtained on glass substrates using chemical molecular beam deposition (CMBD). The samples annealed in air at 200°C for 10, 20, and 30 min. Energy-dispersive X-ray spectroscopy (EDS) showed that the film composition was close to stoichiometric, with a slight decrease in Se content observed with increasing annealing time. SEM and AFM analysis revealed that thermal annealing increased film density, reduced porosity, and smoothed the surface. XRD results confirmed that all samples correspond to the orthorhombic phase of Sb2Se3, with the sample annealed for 10 minutes exhibiting a preferential orientation of the (211), (221), and (002) planes, which are favourable for charge carrier transport. Raman spectroscopy revealed the presence of secondary phases (Se and Sb) in unannealed films, while the annealing process leads to their gradual disappearance. These results indicate that annealing at 200°C improves the structural perfection of Sb2Se3 thin films, increases surface homogeneity, and completely removes secondary phases.
| Mualliflar | Кучкаров, К.М., Эргашев, Б.А., Исаков, Д.З., Хуррамов, Р.Р., Тиванов, М., Юлдашов, Р.Р., Махмудов, М.А., Ачилов, А.C., Пиримматов, M.П., Бобомуродов, Ш., Матмурадов, A., Эшкораев, A. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashriyot | Ўзбекистон Республикаси Фанлар академияси |
| ISSN | 1025-8817, 2181-077X |
| Nashr sanasi | 2026-10-22 |
| Jild | 28 |
| Son | 3 |
| Til | Ingliz |
| Ilmiy soha | Fizika-matematika |
| DOI | 10.52304/.v28i3.663 |
| Indeksga qo‘shilgan | 2026-10-23 |
DOI: 10.52304/.v28i3.663 · Maqolaning asl sahifasi
химического молекулярно-пучкового осаждения (ХМПО), молибденовая подложка, тонкие плёнки, СЭМ, РФА, спектроскопия комбинационного рассеяния света, chemical molecular beam deposition (CMBD), Mo substrate, thin films, SEM, XRD, Raman spectroscopy
| APA | Кучкаров, К.М., Эргашев, Б.А., Исаков, Д.З., Хуррамов, Р.Р., Тиванов, М., Юлдашов, Р.Р., Махмудов, М.А., Ачилов, А.C., Пиримматов, M.П., Бобомуродов, Ш., Матмурадов, A., & Эшкораев, A. (2026). Study of the influence of thermal annealing process on the morphological and structural properties of Sb2Se3 thin films. O‘zbekiston fizika jurnali, 28(3). https://doi.org/10.52304/.v28i3.663 |
|---|---|
| GOST (OAK) | Кучкаров, К.М. va b. Study of the influence of thermal annealing process on the morphological and structural properties of Sb2Se3 thin films // O‘zbekiston fizika jurnali. – 2026. – T. 28, № 3. – DOI: 10.52304/.v28i3.663. |
| MLA | Кучкаров, К.М., Эргашев, Б.А., Исаков, Д.З., Хуррамов, Р.Р., Тиванов, М., Юлдашов, Р.Р., Махмудов, М.А., Ачилов, А.C., Пиримматов, M.П., Бобомуродов, Ш., Матмурадов, A., and Эшкораев, A. “Study of the influence of thermal annealing process on the morphological and structural properties of Sb2Se3 thin films.” O‘zbekiston fizika jurnali, 28(3), 2026. https://doi.org/10.52304/.v28i3.663 |
| Chicago | Кучкаров, К.М., Эргашев, Б.А., Исаков, Д.З., Хуррамов, Р.Р., Тиванов, М., Юлдашов, Р.Р., Махмудов, М.А., Ачилов, А.C., Пиримматов, M.П., Бобомуродов, Ш., Матмурадов, A., and Эшкораев, A. “Study of the influence of thermal annealing process on the morphological and structural properties of Sb2Se3 thin films.” O‘zbekiston fizika jurnali, 28(3) (2026). https://doi.org/10.52304/.v28i3.663 |
| Harvard | Кучкаров, К.М., Эргашев, Б.А., Исаков, Д.З., Хуррамов, Р.Р., Тиванов, М., Юлдашов, Р.Р., Махмудов, М.А., Ачилов, А.C., Пиримматов, M.П., Бобомуродов, Ш., Матмурадов, A., and Эшкораев, A (2026) ‘Study of the influence of thermal annealing process on the morphological and structural properties of Sb2Se3 thin films’, O‘zbekiston fizika jurnali, 28(3). https://doi.org/10.52304/.v28i3.663 |
| BibTeX | @article{article2026,
title = {Study of the influence of thermal annealing process on the morphological and structural properties of Sb2Se3 thin films},
author = {Кучкаров, К.М. and Эргашев, Б.А. and Исаков, Д.З. and Хуррамов, Р.Р. and Тиванов, М. and Юлдашов, Р.Р. and Махмудов, М.А. and Ачилов, А.C. and Пиримматов, M.П. and Бобомуродов, Ш. and Матмурадов, A. and Эшкораев, A.},
journal = {O‘zbekiston fizika jurnali},
year = {2026},
volume = {28},
number = {3},
doi = {10.52304/.v28i3.663},
url = {https://doi.org/10.52304/.v28i3.663}
} |
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