INFLUENCE OF CURRENT DENSITY ON THE OUTPUT OF MULTI-ATOMIC NANOPARTICLES DURING THE SPRAYING OF METALS BY IONS OF INERT GASES

Курбанов, Р., Исаханов, З.А., Косимов, И.О., Халматов, А.С.

O‘zbekiston fizika jurnali · 2019-yil

Annotatsiya

The yield of M1+ atoms and Mn+ type nanoparticles as a function of current density during the sputtering of the surface of metals by accelerated ions was investigated.

Maqola ma’lumotlari
MualliflarКурбанов, Р., Исаханов, З.А., Косимов, И.О., Халматов, А.С.
JurnalO‘zbekiston fizika jurnali
Nashr sanasi2019-10-21
Jild21
Son5
Betlar325-328
TilRus
DOI10.52304/.v21i5.137

Ilmiy soha

O‘zbekiston fizika jurnali jurnalidan boshqa maqolalar

O‘zbekiston fizika jurnali — barcha maqolalar