In this work the energy distributions of Ar+ ions scattering by the surface InP(001) in low indexing directions at the grazing incidence of bombarding ions are presents. In energy distributions the peaks which corresponding to the ions scattered from semichannel, surface atomic chains and defects are observed. Our results are interesting at the study of structure semiconductor surfaces.
| Mualliflar | Тураeв, Н.Ю., Каримов, М.К., Курбанов, М.К., Отабоев, М.У., Кутлиев, У.О. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashr sanasi | 2019-10-21 |
| Jild | 21 |
| Son | 5 |
| Betlar | 299-302 |
| Til | Rus |
| DOI | 10.52304/.v21i5.133 |
DOI: 10.52304/.v21i5.133 · Maqolaning asl sahifasi
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