SinOm+ cluster ions sputtered from Si surface by Xe+ under O2 flooding have been investigated using double focusing ion microanalyzer with reverse geometry. Proposed structural schemes of the cluster cations have been presented, the comparison has been made with the structures of neutrals and anion clusters of silicon oxide.
| Mualliflar | Максимов, С.Е., Ашуров, Х.Б., Адилов, М.М., Коваленко, С.Ф., Тукфатуллин, О.Ф., Хожиев, Ш.Т. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashr sanasi | 2019-10-21 |
| Jild | 21 |
| Son | 5 |
| Betlar | 283-292 |
| Til | Rus |
| DOI | 10.52304/.v21i5.131 |
DOI: 10.52304/.v21i5.131 · Maqolaning asl sahifasi
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