In the work, the optical properties and structural characteristics of TiO2 nanofilms deposited onJGS1 quartz substrates by ALD are investigated. The analysis was carried out for a series ofsamples fabricated with 750, 1000, and 1250 ALD cycles. X-ray diffraction and Raman spectroscopy methods revealed that the films possess a polycrystalline structure with a predominant anatase phase. The optical absorption spectra exhibit strong absorption in the ultravioletregion along with an exponential absorption edge. The optical band gap, determined using theTauc method, is Eg = 3.3 eV, which corresponds to the anatase phase of TiO2. The obtained results confirm the high suitability of the ALD technique for the fabrication of uniform TiO2films with reproducible optical properties, making them promising for applications in photocatalysis and optoelectronics.
| Mualliflar | Турдалиев, Т.К., Зохидов, Х.Х., Абдурахманов, Ф.Ф. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashr sanasi | 2026-08-04 |
| Jild | 28 |
| Son | 2 |
| Til | Rus |
| DOI | 10.52304/.v28i2.649 |
DOI: 10.52304/.v28i2.649 · Maqolaning asl sahifasi
TiO2, атомно-слоевое осаждение, анатаз, тонкие плёнки, оптическое поглощение, ширина запрещённой зоны, XRD, наноструктуры, TiO2, atomic layer deposition (ALD), anatase, thin films, optical absorption, band gap, X-ray diffraction (XRD), nanostructures
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