Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition

Турдалиев, Т.К., Зохидов, Х.Х., Абдурахманов, Ф.Ф.

O‘zbekiston fizika jurnali · 2026-yil

Annotatsiya

In the work, the optical properties and structural characteristics of TiO2 nanofilms deposited onJGS1 quartz substrates by ALD are investigated. The analysis was carried out for a series ofsamples fabricated with 750, 1000, and 1250 ALD cycles. X-ray diffraction and Raman spectroscopy methods revealed that the films possess a polycrystalline structure with a predominant anatase phase. The optical absorption spectra exhibit strong absorption in the ultravioletregion along with an exponential absorption edge. The optical band gap, determined using theTauc method, is Eg = 3.3 eV, which corresponds to the anatase phase of TiO2. The obtained results confirm the high suitability of the ALD technique for the fabrication of uniform TiO2films with reproducible optical properties, making them promising for applications in photocatalysis and optoelectronics.

Maqola ma’lumotlari
MualliflarТурдалиев, Т.К., Зохидов, Х.Х., Абдурахманов, Ф.Ф.
JurnalO‘zbekiston fizika jurnali
NashriyotЎзбекистон Республикаси Фанлар академияси
ISSN1025-8817, 2181-077X
Nashr sanasi2026-08-04
Jild28
Son2
TilIngliz
Ilmiy sohaFizika-matematika
DOI10.52304/.v28i2.649
Indeksga qo‘shilgan2026-08-26

DOI: 10.52304/.v28i2.649 · Maqolaning asl sahifasi

Kalit so‘zlar

TiO2, атомно-слоевое осаждение, анатаз, тонкие плёнки, оптическое поглощение, ширина запрещённой зоны, XRD, наноструктуры, TiO2, atomic layer deposition (ALD), anatase, thin films, optical absorption, band gap, X-ray diffraction (XRD), nanostructures

Ilmiy soha

Fizika-matematika

Iqtibos keltirish

APAТурдалиев, Т.К., Зохидов, Х.Х., & Абдурахманов, Ф.Ф. (2026). Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition. O‘zbekiston fizika jurnali, 28(2). https://doi.org/10.52304/.v28i2.649
GOST (OAK)Турдалиев, Т.К., Зохидов, Х.Х., Абдурахманов, Ф.Ф. Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition // O‘zbekiston fizika jurnali. – 2026. – T. 28, № 2. – DOI: 10.52304/.v28i2.649.
MLAТурдалиев, Т.К., Зохидов, Х.Х., and Абдурахманов, Ф.Ф. “Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition.” O‘zbekiston fizika jurnali, 28(2), 2026. https://doi.org/10.52304/.v28i2.649
ChicagoТурдалиев, Т.К., Зохидов, Х.Х., and Абдурахманов, Ф.Ф. “Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition.” O‘zbekiston fizika jurnali, 28(2) (2026). https://doi.org/10.52304/.v28i2.649
HarvardТурдалиев, Т.К., Зохидов, Х.Х., and Абдурахманов, Ф.Ф (2026) ‘Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition’, O‘zbekiston fizika jurnali, 28(2). https://doi.org/10.52304/.v28i2.649
BibTeX
@article{article2026,
  title = {Optical absorption and structural characteristics of TiO2 nanofilms deposited on quartz glass by atomic layer deposition},
  author = {Турдалиев, Т.К. and Зохидов, Х.Х. and Абдурахманов, Ф.Ф.},
  journal = {O‘zbekiston fizika jurnali},
  year = {2026},
  volume = {28},
  number = {2},
  doi = {10.52304/.v28i2.649},
  url = {https://doi.org/10.52304/.v28i2.649}
}

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