In the study, the diffusion of copper atoms in crystallized poly-germanium films deposited on aSiO2 substrate at a temperature of 550 K was investigated using secondary ion mass spectrometry(SIMS). The obtained mass spectra for films of different thicknesses (0.07 and 0.36 μm)showed that copper actively diffuses through the poly-germanium and accumulates at theGe/SiO2 interface. A phenomenon of reverse diffusion of copper from the interface back intothe film observed, most prominently in thin films (0.07 μm). This may relate to interfaceeffects and the presence of defects in the crystalline structure of Ge and SiO2 that promotecopper accumulation. The presented results indicate differences in diffusion mechanismsdepending on the film thickness and highlight role of interfacial effects in shaping the copperconcentration profile.
| Mualliflar | Халматов, А.С., Джаббарганов, Р., Исаханов, З.А. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashriyot | Ўзбекистон Республикаси Фанлар академияси |
| ISSN | 1025-8817, 2181-077X |
| Nashr sanasi | 2026-02-18 |
| Jild | 27 |
| Son | 4 |
| Til | Ingliz |
| Ilmiy soha | Fizika-matematika |
| DOI | 10.52304/.v27i4.616 |
| Indeksga qo‘shilgan | 2026-08-26 |
DOI: 10.52304/.v27i4.616 · Maqolaning asl sahifasi
вторичная ионная масс-спектрометрия (ВИМС), медь, полигерманий, граница, отжиг, диффузия, secondary ion mass spectrometry (SIMS), poly-germanium, boundary, annealing, diffusion
| APA | Халматов, А.С., Джаббарганов, Р., & Исаханов, З.А. (2026). A study of copper distribution during thermal diffusion in germanium layers on silicon oxide. O‘zbekiston fizika jurnali, 27(4). https://doi.org/10.52304/.v27i4.616 |
|---|---|
| GOST (OAK) | Халматов, А.С., Джаббарганов, Р., Исаханов, З.А. A study of copper distribution during thermal diffusion in germanium layers on silicon oxide // O‘zbekiston fizika jurnali. – 2026. – T. 27, № 4. – DOI: 10.52304/.v27i4.616. |
| MLA | Халматов, А.С., Джаббарганов, Р., and Исаханов, З.А. “A study of copper distribution during thermal diffusion in germanium layers on silicon oxide.” O‘zbekiston fizika jurnali, 27(4), 2026. https://doi.org/10.52304/.v27i4.616 |
| Chicago | Халматов, А.С., Джаббарганов, Р., and Исаханов, З.А. “A study of copper distribution during thermal diffusion in germanium layers on silicon oxide.” O‘zbekiston fizika jurnali, 27(4) (2026). https://doi.org/10.52304/.v27i4.616 |
| Harvard | Халматов, А.С., Джаббарганов, Р., and Исаханов, З.А (2026) ‘A study of copper distribution during thermal diffusion in germanium layers on silicon oxide’, O‘zbekiston fizika jurnali, 27(4). https://doi.org/10.52304/.v27i4.616 |
| BibTeX | @article{article2026,
title = {A study of copper distribution during thermal diffusion in germanium layers on silicon oxide},
author = {Халматов, А.С. and Джаббарганов, Р. and Исаханов, З.А.},
journal = {O‘zbekiston fizika jurnali},
year = {2026},
volume = {27},
number = {4},
doi = {10.52304/.v27i4.616},
url = {https://doi.org/10.52304/.v27i4.616}
} |
Boshqa maqola uchun iqtibos tayyorlash
This paper presents the results of a study on modeling and predicting the critical superconductingtemperature (Tc) of YBa2Cu3O7δ (YBCO) samples synthesized via the solid-state reactionmethod, using a multiparameter…
A simulation study of a solar-transversely pumped Cr:Nd:YAG laser with Monte Carlo photontracing technique was conducted. The model was used to calculate the pump efficiency, pumpand temperature distributions, and…
In this paper, a new method for determining the density of defect states of amorphous semiconductorsis proposed. It is shown that if the experimental curve of the optical absorptionspectrum of an amorphous semiconductor…
In the study the effect of doping by boron (B) on the electrical properties of double-walledcarbon nanotubes (DWCNTs) at various temperatures (from 300 K to 1500 K was investigated.The introduction of boron atoms into…
The films Sb2(SxSe1-x)3 were studied by scanning electron microscopy of films grown at differentvapor pressures. Microcrystals in the films are evenly distributed over the surface of thesubstrate. The morphology of the…
The composition and electronic structure of tungsten films with surface oxygen (O2) layerswere investigated using photoelectron and electron spectroscopy methods under ultra-high vacuumconditions. It was found that…
In recent years, photodynamic therapy (PDT) has become an effective and minimally invasiveapproach for treating cancer and infectious diseases. However, conventional photosensitizers(PS) are limited by short absorption…
The study aims to address the problem of producing low-cost and high-quality metallic powderfrom Ti-6Al-4V alloy with morphological characteristics and particle size distribution thatmeet the requirements of additive…
In this work, carbon nanotubes were synthesized using the catalytic thermal chemical vapordeposition (CVD) method. A thin layer of Ni catalyst was deposited onto a Si substrate with aSiO2 buffer layer using the electron…
In the study, the performance and working mechanisms of memristors based on organicinorganichalide perovskite (OIHP) materials with two distinct configurations: ITO/PEDOT:PSS/Cs0.15MA0.15FA0.7Pb(I0.8Br0.2)3/InGa and…
O‘zbekiston fizika jurnali — barcha maqolalar · 2026-yil arxivi
The yield of M1+ atoms and Mn+ type nanoparticles as a function of current density during the sputtering of the surface of metals by accelerated ions was investigated.
In the paper, the results of mathematical modeling of heterogeneous processes are presented indicating the applicability of the method of thermal-desorption surface-ionization spectrometry to determine the kinetic…
By the secondary ion mass spectrometry (SIMS) method, the distribution of boron impuritieswas examined in multilayer thin films of polycrystalline silicon doped with boron and nitrogen,deposited on SiO2 substrate, both…
In this work, we studied the change in the elemental and chemical composition of the Cu surface during cleaning by heating in combination with ion bombardment. For the elemental analysis of copper and the chemical…
Using the methods of powder X-ray diffraction, secondary ion mass-spectroscopy, Auger electron spectroscopy, photoelectron spectroscopy, and spectroscopy of elastically reflected electrons, the composition, density of…
This article presents the results of 2018-2023, such as biological diversity, inter-landscape distribution characteristics, density,and number of straggly insects identified from natural and anthropogenic areas of…
This article observational data on the species composition, distribution, population, density, and seasonal damage caused causedby herbivorus bugs. Observationes were carried out in April and September 2021. When…
In the article, the research fields of some species belonging to Paeonia, their significance in human life, adaptation features tovarious ecological conditions are highlighted, and the ecologist groups and other…
This article studies the number of species, population density of terrestrial mollusks of the Topalangdarya basin, located in theSurkhandarya region of Uzbekistan, in various altitudinal regions and biotopes and…
This article sheds light on changes in biomass formation and antimicrobial activity against test pathogenic strains under theinfluence of epigenetic modifiers and elicitors of the endophytic fungus Penicillium…
Shahimardonsoy covered issues such as the soil in the river basin and measures to increase its condition, salinity and fertility, theflora and fauna present in the basin landscape and their conservation.