In this work, the ohmic contact has been investigated for n-4H-SiC. It is shown that a Schottky barrier is formed in the samples during the vacuum heat treatment at 700°C, and at 950°C nickel atoms begin to actively diffuse into the n-4H-SiC crystal, which leads to the disappearance of the sharp metal-semiconductor interface and, consequently, to the disappearance of the Schottky barrier. The resistivity of nickel ohmic contacts obtained for n-type 4H-SiC is determined. The lowest resistivity of ohmic contact was about 17×10−5 Ohm·cm.
| Mualliflar | Жураев, Х.Н., Хажиев, М.У., Давлатов, А.Б., Абдулазизов, Б.Т., Атабаев, Б.Г. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashriyot | Ўзбекистон Республикаси Фанлар академияси |
| ISSN | 1025-8817, 2181-077X |
| Nashr sanasi | 2023-06-25 |
| Jild | 25 |
| Son | 2 |
| Til | Ingliz |
| Ilmiy soha | Fizika-matematika |
| DOI | 10.52304/.v25i2.419 |
| Indeksga qo‘shilgan | 2026-08-26 |
DOI: 10.52304/.v25i2.419 · Maqolaning asl sahifasi
4H-SiC, омический контакт, термическая обработка, барьер Шоттки, 4H-SiC, ohmic contact, thermal treatments, Schottky barrier
| APA | Жураев, Х.Н., Хажиев, М.У., Давлатов, А.Б., Абдулазизов, Б.Т., & Атабаев, Б.Г. (2023). Ohmic contact for n-4H-SiC. O‘zbekiston fizika jurnali, 25(2). https://doi.org/10.52304/.v25i2.419 |
|---|---|
| GOST (OAK) | Жураев, Х.Н. va b. Ohmic contact for n-4H-SiC // O‘zbekiston fizika jurnali. – 2023. – T. 25, № 2. – DOI: 10.52304/.v25i2.419. |
| MLA | Жураев, Х.Н., Хажиев, М.У., Давлатов, А.Б., Абдулазизов, Б.Т., and Атабаев, Б.Г. “Ohmic contact for n-4H-SiC.” O‘zbekiston fizika jurnali, 25(2), 2023. https://doi.org/10.52304/.v25i2.419 |
| Chicago | Жураев, Х.Н., Хажиев, М.У., Давлатов, А.Б., Абдулазизов, Б.Т., and Атабаев, Б.Г. “Ohmic contact for n-4H-SiC.” O‘zbekiston fizika jurnali, 25(2) (2023). https://doi.org/10.52304/.v25i2.419 |
| Harvard | Жураев, Х.Н., Хажиев, М.У., Давлатов, А.Б., Абдулазизов, Б.Т., and Атабаев, Б.Г (2023) ‘Ohmic contact for n-4H-SiC’, O‘zbekiston fizika jurnali, 25(2). https://doi.org/10.52304/.v25i2.419 |
| BibTeX | @article{article2023,
title = {Ohmic contact for n-4H-SiC},
author = {Жураев, Х.Н. and Хажиев, М.У. and Давлатов, А.Б. and Абдулазизов, Б.Т. and Атабаев, Б.Г.},
journal = {O‘zbekiston fizika jurnali},
year = {2023},
volume = {25},
number = {2},
doi = {10.52304/.v25i2.419},
url = {https://doi.org/10.52304/.v25i2.419}
} |
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