SURFACE STRUCTURAL TRANSFORMATIONS OBSERVED IN Si (111) AND Si (100) DURING THE FORMATION OF SILICIDE FILMS

Рысбаев, А.С., Нормуродов, М.Т., Бекпулатов, И.Р., Рахимов, А.М., Игамов, Б.Д.

O‘zbekiston fizika jurnali · 2018-yil

Annotatsiya

The processes of formation of thin nanosized films of Ba silicides and alkaline elements during their low-energy and high-dose implantation in Si(111) and Si(100) have been studied using electron spectroscopy, transmission scanning electron microscopy, and diffraction of slow electrons. Optimal technological conditions for the receipt of silicide films are determined. It is shown that the forming films of metal silicides have new superstructures that are different from pure silicon ones. An analysis of the results is given.

Maqola ma’lumotlari
MualliflarРысбаев, А.С., Нормуродов, М.Т., Бекпулатов, И.Р., Рахимов, А.М., Игамов, Б.Д.
JurnalO‘zbekiston fizika jurnali
Nashr sanasi2018-05-21
Jild20
Son3
Betlar165-172
TilRus
DOI10.52304/.v20i3.87

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