The results of decreasing the epitaxy temperature up to 900−1100 K to produce sufficiently perfect films under vacuum deposition and by ion stimulation have been presented.
| Mualliflar | Абдурахманов, Б.М., Ашуров, М.Х., Ашуров, Х.Б., Каланов, М.У., Кучканов, Ш.К., Кутлимуротов, Б.Р., Максимов, С.Е., Ниматов, С.Ж. |
|---|---|
| Jurnal | O‘zbekiston fizika jurnali |
| Nashr sanasi | 2018-05-21 |
| Jild | 20 |
| Son | 3 |
| Betlar | 158-164 |
| Til | Rus |
| DOI | 10.52304/.v20i3.86 |
DOI: 10.52304/.v20i3.86 · Maqolaning asl sahifasi
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