In this study, using the method of electron probe analysis, the sequence of formation of various impurity precipitates of nickel in silicon in the process of diffusion doping at a temperature of T = 1573 K was investigated. The influence of the value of the cooling rate of the samples after diffusion annealing on the formation of impurity precipitates was considered. The morphological parameters of impurity precipitates of nickel in silicon have been revealed, and their chemical compositions have been determined. It was found that, depending on the size and shape, the nickel precipitates can have a single or multilayer structure
| Mualliflar | S. Z. Zaynabidinov, N. A. Turgunov, E.Kh. Berkinov, R.M. Turmanova, nstitute of Semiconductor Physics and Microelectronics at NUUz, Tashkent, 100057. Uzbekistan |
|---|---|
| Jurnal | (2019) Яримўтказгичлар физикаси ва микроэлектроника журнали |
| Nashr sanasi | 2021-06-30 |
| Jild | 3 |
| Son | 3 |
| Betlar | 8-12 |
| Til | en |
| DOI | 10.37681/2181-1652-019-x-2021-3-1 |
DOI: 10.37681/2181-1652-019-x-2021-3-1 · Maqolaning asl sahifasi
The linear - circular dichroism of two and three photon absorption of light in semiconductors of cubic symmetry of hole conductivity is theoretically investigated. The matrix elements of two and three - photon optical…
In this article, the experimental analysis of possibility of use of deformation of a crystal lattice of silicon for increase of efficiency of photoelectric transformation of energy made . For the first time the flex…
the method of digital modelling investigates influence of temperature on photo- electric processes in silicon solar cells. Feat ure of program system “Sentaurus TCAD” which allowed to model silicon solar cells with flat…
This article shows that the Fermi levels of a nanoscale semiconductor in a quantizing magnetic field are quantized. A method is proposed for calculating the Fermi energy oscillations for a two-dimensional electron gas…
The article proposes a two - wave method for measuring the water content in oil and creates an optoelectronic device based on it. To develop this me thod, the absorption spectra of water were studied and it was shown…
In this article investigated the effects of a quantizing magnetic field and temperature on Fermi energy oscillations in nanoscale semiconducto r materials. It is shown that the Fermi energy of a nanoscale semiconductor…
A diffusion technology for doping silicon with impurity atoms of sulfur preventing surface erosion has been developed. The technology could be used to create relevant semiconductor devices. Controlling diffusant vapor…
In this work, it is shown that the introducti on of nickel atoms in the process of growing a silicon crystal makes it possible to obtain a mate rial with stable electrophysical parameters during thermal annealing at a…
The paper considers the mechanisms of pol lution and deposition on the surface of photovoltaic batteries (PVB) in various conditions of the seasons and incidence angles from the degree of surface treatment of…
New types of thermal energy converters are described, the working fluid of which is made of granular silicon, which is a silicon powder, the particles of which are not sintered and are not fused with each other. In such…
(2019) Яримўтказгичлар физикаси ва микроэлектроника журнали — barcha maqolalar