This study investigates the spatial heterogeneity of Raman scattering and surface morphology in n-type Si (100) single crystals subjected to manganese ion implantation. Implantation was performed at 40 keV with doses from 5·10^15–1·10^17 ions/cm² into substrates with a phosphorus concentration of ~9.3·10^14 cm⁻³. Atomic force microscopy (AFM) and backscattering Raman spectroscopy were employed to evaluate surface topography and structural modifications. AFM micrographs revealed dose-dependent, nanoscale surface roughness and self-organized structures absent on pristine substrates. Unimplanted samples exhibited a Lorentzian sharp Raman peak at 520.0±1.0 cm⁻¹, characteristic of bulk crystalline silicon. Conversely, Mn-implanted samples displayed additional peaks (184, 291, 373, 468, 659, 798, and 804 cm⁻¹) associated with radiation-induced defects and complex nanoscale phases involving Si, Mn, and P atoms. The formation of deep Mn centers modifies carrier recombination dynamics and generates localized optical centers detectable via scattering intensity mapping. These findings demonstrate a non-destructive diagnostic approach for mapping deep-level impurity distributions in semiconductor device structures.
| Mualliflar | E. Arzikulov, F. Salaxitdinov, Yujin Wang, 呂紹瑋, Teng Liu, Zhisheng Nong |
|---|---|
| Jurnal | Samarqand davlat universiteti ilmiy tadqiqotlar axborotnomasi |
| Nashr sanasi | 2026-07-01 |
| Jild | 1 |
| Son | 3 |
| Betlar | 44-49 |
| DOI | 10.59251/2181-3973.2025.v1.138.1.3884 |
DOI: 10.59251/2181-3973.2025.v1.138.1.3884 · Maqolaning asl sahifasi
The correlation function of coherent scattering was studied by the dynamic light scattering (DLS) method for aqueous γ-picoline solutions of low concentrations (mole fractions of 0.003 and 0.005) in the temperature…
The work is devoted to an experimental study of the temperature and concentration dependences of the Hall coefficient and electrical resistivity of double continuous solid solutions of the molybdenum-niobium system at…
This study investigates the synthesis of mesoporous silica (SBA-15) using a natural surfactant, Geranyl acetate saponin, and its application as an organo–inorganic hybrid supercapacitor material after modification with…
In this article, the electrophysical properties of Ni/SiO₂/n-Si metal-oxide-semiconductor (MOS) structures formed on n-type monocrystalline silicon substrates in the [111], [110], and [100] crystallographic orientations…
In this work, the inverse spectral problem method is applied to integrate an equation composed of a combination of nonlinear KdV(+1) and KdV(-1) equations with an integral source. An infinite system of Dubrovin…
This paper investigates the qualitative properties of weak solutions to a coupled system of nonlinear weighted parabolic equations featuring p-Laplacian diffusion and exponential reaction terms. By employing a…
The article considers montmorillonite and laponite as promising layered silicates for the development of adsorbents and functional materials. The interest in these materials is attributed to their unique structure…
This paper proposes an improvement of a client-server architecture designed to detect insider threats by monitoring file operations of users working with documents in real time. The study considers actions such as file…
In this work, a new complex compound based on 4-nitroftalic acid and ethylenediamine of composition [C8H3NO6]2−·(C2H10N2)2+ was synthesized for the first time. The complex compound was grown from solution by slow…
Annotatsiya: Maqolada cho'l, voha (sug'oriladigan tekisliklar) va tog' geografik uchligining asosiy geografik xususiyatlari ko'rib chiqilgan. 3 ta universal geografik qonuniyatlar - kenglik zonalligi, sektorlik…
Samarqand davlat universiteti ilmiy tadqiqotlar axborotnomasi — barcha maqolalar