The development of highly efficient and fast semiconductor components, as well as ultra-large integrated circuits (VLSI), requires the use of new materials in production processes. One of the most promising materials for modern microelectronics are metal silicides. These connections are widely used in solid-state electronics, in particular, to create rectifier and ohmic contacts, as well as conductive elements in integrated circuits. In addition, magnesium silicide single crystals exhibit excellent thermal efficiency characteristics, which makes magnesium and silicon attractive materials for creating thin-film semiconductor compounds such as MgSi, which have high thermal efficiency.
| Mualliflar | Asanov, D.J., Ashirbekova, S.U. |
|---|---|
| Jurnal | Ilim ha’m ja’miyet |
| Nashr sanasi | 2024-12-23 |
| Son | 6-1 |
| Betlar | 4-6 |
| Til | uz_Latn |
silisidlar, elemenlar tarkibi, VLSI (o‘ta keng ko‘lamli integral mikrosxemalar), faza tarkibi, elektron diffraktsiya sxemasi, силициды, элементный состав, СБИС (сверхбольшие интегральные схемы), фазовый состав, электронограмма, silicides, elemental composition, VLSIC (very large-scale integrated circuits), phase composition, electronogram
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