This is not a sufficient condition for creating silicide-silicon heterojunctions and building new semiconductor devices. Therefore, it is of undoubted interest to develop new methods for the formation of Mg2Si films on silicon, in which higher temperatures can be used to improve the crystalline quality of the films. In this work, the rapid heat treatment (RHT) method was used to form magnesium silicide. on the basis of which the optimal temperatures and pulse durations for the synthesis of magnesium silicide are determined
| Mualliflar | Asanov, D.J. |
|---|---|
| Jurnal | Ilim ha’m ja’miyet |
| Nashr sanasi | 2023-03-01 |
| Son | 1-1 |
| Betlar | 4-6 |
| Til | uz_Latn |
tez issiqlik bilan ishlov berish (TIB), magniy silicidi, impulsli fotonik ishlov berish, geterostruktura, Si/Mg/Si/sitall tizimi, быстрая термическая обработка (БТО), силицид магния, импульсная фотонная обработка, гетероструктура, система Si/Mg/Si/ситалл, rapid heat treatment (RHT), magnesium silicide, pulsed photonic treatment, heterostructure, Si/Mg/Si/sitall system
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