The paper presents modeling and experimental study of thermal processes in silicon-based Ni (5 at. % Pt)/Si heterostructures under rapid photon annealing. Three heat transfer regimes are analyzed: adiabatic, heat-flow, and thermal-balance. Temperature profiles show that at an energy density of 255 J/cm2 and a pulse duration of 1.8 s, the system reaches a thermal balance mode enabling uniform heating and the formation of the Ni2Si phase. Pt-doping improves thermal stability and reduces substrate deformation.
| Mualliflar | Asanov, D.J., Асанов, Д.Ж., Асанов, Д.Ж. |
|---|---|
| Jurnal | Ilim ha’m ja’miyet |
| Nashr sanasi | 2026-02-16 |
| Son | 1-1 |
| Betlar | 11-13 |
| Til | Rus |
кремний гетероструктуралари, тезкор иссиқлик билан ишлов бериш, импульсли фотон ишлови, иссислиқ баланси, никел цилиндирлари, моделлаштириш, кремниевые гетероструктуры, быстрая термическая обработка, импульсная фотонная обработка, тепловой баланс, силициды никеля, моделирование, silicon heterostructures, rapid thermal processing, pulsed photon annealing, thermal balance, nickel silicides, modeling
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