Determination of the crystal structure and integration zone width of si nanophases and si nanolayers formed under the SIO2 surface.

Allayarova, Gulmira, Allanazarova, Sarvinoz, Buronov, Nurlibek

Al-Farg'oniy avlodlari · 2025-yil

Annotatsiya

After bombarding the SiO2 sample with Ar+ ions and subsequent heating, Si nanophases and nanolayers were formed at different depths of the sample. If the obtained substrate had an amorphous structure, the formed nanophases and layers also had an amorphous crystalline structure, while these layers also retained the crystalline structure. By changing the ion energy to E=10–25 keV, Si nanophases and nanolayers were formed at depths of dcр=15–20 nm. When the ion dose was small, nanophases were formed, and when the dose was increased, nanolayers were formed. The thickness of the formed nanolayer was 8–10 nm.

Maqola ma’lumotlari
MualliflarAllayarova, Gulmira, Allanazarova, Sarvinoz, Buronov, Nurlibek
JurnalAl-Farg'oniy avlodlari
NashriyotТАТУ Фарғона филиали
ISSN2181-4252
Nashr sanasi2025-06-03
Son2
Betlar118-121
TilIngliz
Ilmiy sohaTexnika
Indeksga qo‘shilgan2026-08-26

Maqolaning asl sahifasi

Kalit so‘zlar

Ключевые слова: ионная имплантация, термическое окисление, нанофаз, нанослои, наноструктуры., Key words: ion implantation, thermal oxidation, secondary electron spectroscopy, nanostructures, Kalit so‘zlar: ion implantatsiya, termik oksidlash, nanofazalar, nanoqatlamlar, nanotuzilmalar.

Ilmiy soha

Texnika

Iqtibos keltirish

APAAllayarova, Gulmira, Allanazarova, Sarvinoz, & Buronov, Nurlibek (2025). DETERMINATION OF THE CRYSTAL STRUCTURE AND INTEGRATION ZONE WIDTH OF SI NANOPHASES AND SI NANOLAYERS FORMED UNDER THE SIO2 SURFACE.. Al-Farg'oniy avlodlari, (2), 118-121. https://al-fargoniy.uz/index.php/journal/article/view/823
GOST (OAK)Allayarova, Gulmira, Allanazarova, Sarvinoz, Buronov, Nurlibek DETERMINATION OF THE CRYSTAL STRUCTURE AND INTEGRATION ZONE WIDTH OF SI NANOPHASES AND SI NANOLAYERS FORMED UNDER THE SIO2 SURFACE. // Al-Farg'oniy avlodlari. – 2025. – № 2. – P. 118-121.
MLAAllayarova, Gulmira, Allanazarova, Sarvinoz, and Buronov, Nurlibek. “DETERMINATION OF THE CRYSTAL STRUCTURE AND INTEGRATION ZONE WIDTH OF SI NANOPHASES AND SI NANOLAYERS FORMED UNDER THE SIO2 SURFACE..” Al-Farg'oniy avlodlari, (2), 118-121, 2025. https://al-fargoniy.uz/index.php/journal/article/view/823
ChicagoAllayarova, Gulmira, Allanazarova, Sarvinoz, and Buronov, Nurlibek. “DETERMINATION OF THE CRYSTAL STRUCTURE AND INTEGRATION ZONE WIDTH OF SI NANOPHASES AND SI NANOLAYERS FORMED UNDER THE SIO2 SURFACE..” Al-Farg'oniy avlodlari, (2), 118-121 (2025). https://al-fargoniy.uz/index.php/journal/article/view/823
HarvardAllayarova, Gulmira, Allanazarova, Sarvinoz, and Buronov, Nurlibek (2025) ‘DETERMINATION OF THE CRYSTAL STRUCTURE AND INTEGRATION ZONE WIDTH OF SI NANOPHASES AND SI NANOLAYERS FORMED UNDER THE SIO2 SURFACE.’, Al-Farg'oniy avlodlari, (2), 118-121. https://al-fargoniy.uz/index.php/journal/article/view/823
BibTeX
@article{allayarovagulmira2025,
  title = {DETERMINATION OF THE CRYSTAL STRUCTURE AND INTEGRATION ZONE WIDTH OF SI NANOPHASES AND SI NANOLAYERS FORMED UNDER THE SIO2 SURFACE.},
  author = {Allayarova, Gulmira and Allanazarova, Sarvinoz and Buronov, Nurlibek},
  journal = {Al-Farg'oniy avlodlari},
  year = {2025},
  number = {2},
  pages = {118-121},
  url = {https://al-fargoniy.uz/index.php/journal/article/view/823}
}

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