In this work, using the complex methods of secondary electron spectroscopy and photoelectron spectroscopy, the electronic structure and physical-optical properties of MoO3 nanofilms formed on the surface of Mo by the method of bombarding Mo with O2+ ions were studied. It was seen that the bandgap width of the formed MoO3 nanofilm is Eg = 3.4 eV, the roughness of the surface is 1.5 nm. It was shown that when O2+ ions are implanted in pure Mo, the density of valence electrons in the valence bands changes.
| Mualliflar | Аллаярова, Гулмира, Буронов , Нурлибек, Зарипов , Шухрат |
|---|---|
| Jurnal | Al-Farg'oniy avlodlari |
| Nashr sanasi | 2024-10-20 |
| Son | 3 |
| Betlar | 57-60 |
| Til | Rus |
ионная имплантация, термическое окисление, спектроскопия вторичных электронов, наноструктуры, ion implantation, thermal oxidation, secondary electron spectroscopy, nanostructures, ion implantatsiya, termik oksidlash, ikkilamchi elektronlar spektroskopiyasi, nanotuzilmalar
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