The effect of heat treatment on the magnitude of internal mechanical stresses in ohmic contacts to Si has been studied. Heat treatment of the Au-Ti-n+-Si contact structure led to sample straightening and in the Au-Ti-Pd2Si-p+-Si contact structure to an increase in the radius of curvature.
| Mualliflar | Исмайлов, К.А., Атаубаева, А.Б., Насырова, Г.М. |
|---|---|
| Jurnal | Ilim ha’m ja’miyet |
| Nashr sanasi | 2023-03-01 |
| Son | 1-1 |
| Betlar | 16-18 |
| Til | Rus |
omik kontakt, kremniy, issiqlik bilan ishlov berish, ichki mexanik kuchlanishlar, egrilik radiusi, омический контакт, кремний, термическая обработка, внутренние механические напряжения, радиус кривизны, ohmic contact, silicon, heat treatment, internal mechanical stresses, radius of curvature
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