Cvd growth and characterization of multilayer graphene domains on copper with polymer-assisted transfer onto SiO₂/Si substrates

Tursunkulov, Oybek, Khojieva, Gulmira, Sobitov, Mirazim, Gulyamov, Bahodir, Bozorov, Soyibjon, Khojiev, Shokir, Akbarov, Khamdam

Ўзбекистон Миллий университети хабарлари · 2026-yil

Annotatsiya

This work presents the synthesis of multilayer graphene domains on copper substrates by thermalchemical vapor deposition (CVD). A detailed description of the CVD reactor system is provided,including the use of argon as a cooling medium and methane as the carbon precursor. Optimalprocess parameters temperature regimes, gas flow rates, working pressure, and cooling profileswere experimentally determined. Surface morphology was examined using optical and fieldemission scanning electron microscopy, revealing discrete rectangular graphene domains withheterogeneous orientations. Raman spectroscopy confirmed the multilayer nature of the domains,the presence of structural defects, and variations in crystallinity. PMMA-assisted transfer ofgraphene onto SiO2/Si substrates was also investigated; microscopy revealed the presence ofpolymer residues, wrinkles, and surface contamination. These findings demonstrate both theeffectiveness of thermal CVD for producing domain-structured multilayer graphene and thelimitations of polymer-mediated transfer. The results contribute to improving synthesis andtransfer strategies for advanced graphene-based electronic, sensing, and energy devices.

Maqola ma’lumotlari
MualliflarTursunkulov, Oybek, Khojieva, Gulmira, Sobitov, Mirazim, Gulyamov, Bahodir, Bozorov, Soyibjon, Khojiev, Shokir, Akbarov, Khamdam
JurnalЎзбекистон Миллий университети хабарлари
NashriyotЎзбекистон Миллий университети
ISSN2181-7324, 3093-8996
Nashr sanasi2026-10-14
Jild1
Son1
Betlar3-15
TilIngliz
Ilmiy sohaKimyo
Indeksga qo‘shilgan2026-10-18

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APATursunkulov, Oybek, Khojieva, Gulmira, Sobitov, Mirazim, Gulyamov, Bahodir, Bozorov, Soyibjon, Khojiev, Shokir, & Akbarov, Khamdam (2026). CVD GROWTH AND CHARACTERIZATION OF MULTILAYER GRAPHENE DOMAINS ON COPPER WITH POLYMER-ASSISTED TRANSFER ONTO SiO₂/Si SUBSTRATES. Ўзбекистон Миллий университети хабарлари, 1(1), 3-15. https://journals.nuu.uz/index.php/modernchemistry/article/view/15443
GOST (OAK)Tursunkulov, Oybek va b. CVD GROWTH AND CHARACTERIZATION OF MULTILAYER GRAPHENE DOMAINS ON COPPER WITH POLYMER-ASSISTED TRANSFER ONTO SiO₂/Si SUBSTRATES // Ўзбекистон Миллий университети хабарлари. – 2026. – T. 1, № 1. – P. 3-15.
MLATursunkulov, Oybek, Khojieva, Gulmira, Sobitov, Mirazim, Gulyamov, Bahodir, Bozorov, Soyibjon, Khojiev, Shokir, and Akbarov, Khamdam. “CVD GROWTH AND CHARACTERIZATION OF MULTILAYER GRAPHENE DOMAINS ON COPPER WITH POLYMER-ASSISTED TRANSFER ONTO SiO₂/Si SUBSTRATES.” Ўзбекистон Миллий университети хабарлари, 1(1), 3-15, 2026. https://journals.nuu.uz/index.php/modernchemistry/article/view/15443
ChicagoTursunkulov, Oybek, Khojieva, Gulmira, Sobitov, Mirazim, Gulyamov, Bahodir, Bozorov, Soyibjon, Khojiev, Shokir, and Akbarov, Khamdam. “CVD GROWTH AND CHARACTERIZATION OF MULTILAYER GRAPHENE DOMAINS ON COPPER WITH POLYMER-ASSISTED TRANSFER ONTO SiO₂/Si SUBSTRATES.” Ўзбекистон Миллий университети хабарлари, 1(1), 3-15 (2026). https://journals.nuu.uz/index.php/modernchemistry/article/view/15443
HarvardTursunkulov, Oybek, Khojieva, Gulmira, Sobitov, Mirazim, Gulyamov, Bahodir, Bozorov, Soyibjon, Khojiev, Shokir, and Akbarov, Khamdam (2026) ‘CVD GROWTH AND CHARACTERIZATION OF MULTILAYER GRAPHENE DOMAINS ON COPPER WITH POLYMER-ASSISTED TRANSFER ONTO SiO₂/Si SUBSTRATES’, Ўзбекистон Миллий университети хабарлари, 1(1), 3-15. https://journals.nuu.uz/index.php/modernchemistry/article/view/15443
BibTeX
@article{tursunkulovoybek2026,
  title = {CVD GROWTH AND CHARACTERIZATION OF MULTILAYER GRAPHENE DOMAINS ON COPPER WITH POLYMER-ASSISTED TRANSFER ONTO SiO₂/Si SUBSTRATES},
  author = {Tursunkulov, Oybek and Khojieva, Gulmira and Sobitov, Mirazim and Gulyamov, Bahodir and Bozorov, Soyibjon and Khojiev, Shokir and Akbarov, Khamdam},
  journal = {Ўзбекистон Миллий университети хабарлари},
  year = {2026},
  volume = {1},
  number = {1},
  pages = {3-15},
  url = {https://journals.nuu.uz/index.php/modernchemistry/article/view/15443}
}

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