The article states that in the results of growing erbium-doped epitaxial silicon layers using two different growth modes: conventional molecular beam epitaxy (MBE) and solid-phase epitaxy (SPE) are presented. It has been shown that an erbium-doped silicon layer, when deposited by SPE on a cold substrate and after annealing, exhibits a more intense photoluminescence band at a wavelength of 1.54µm.
| Mualliflar | Шарибаев, М.Б., Каландарова, Ш.К. |
|---|---|
| Jurnal | Ilim ha’m ja’miyet |
| Nashr sanasi | 2025-03-29 |
| Son | 2-1 |
| Betlar | 46-47 |
| Til | Rus |
эпитаксиал пленкалар, легирлаш, фотолюминесценция, интенсивлик, эпитаксиальные пленки, легирование, фотолюминесценция, интенсивность, epitaxial films, doping, photoluminescence, intensity
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