The article states that in the results of growing erbium-doped epitaxial silicon layers using two different growth modes: conventional molecular beam epitaxy (MBE) and solid-phase epitaxy (SPE) are presented. It has been shown that an erbium-doped silicon layer, when deposited by SPE on a cold substrate and after annealing, exhibits a more intense photoluminescence band at a wavelength of 1.54µm.
| Mualliflar | Шарибаев, М.Б., Каландарова, Ш.К. |
|---|---|
| Jurnal | Ilim ha’m ja’miyet |
| Nashriyot | Нукус давлат педагогика институти |
| ISSN | 2010-720x, 2181-1555 |
| Nashr sanasi | 2025-03-29 |
| Son | 2-1 |
| Betlar | 46-47 |
| Til | Rus |
| Indeksga qo‘shilgan | 2026-08-26 |
эпитаксиал пленкалар, легирлаш, фотолюминесценция, интенсивлик, эпитаксиальные пленки, легирование, фотолюминесценция, интенсивность, epitaxial films, doping, photoluminescence, intensity
| APA | Шарибаев, М.Б., & Каландарова, Ш.К. (2025). ИЗМЕНЕНИЕ РЕЛАКСАЦИОННЫХ ПРОЦЕССОВ ЭПИТАКСИАЛЬНЫХ СЛОЕВ КРЕМНИЯ ПОСЛЕ ВОЗДЕЙСТВИЯ АТОМА ЭРБИЯ. Ilim ha’m ja’miyet, (2-1), 46-47. https://journal.ndpi.uz/index/article/view/2025-2-1-016 |
|---|---|
| GOST (OAK) | Шарибаев, М.Б., Каландарова, Ш.К. ИЗМЕНЕНИЕ РЕЛАКСАЦИОННЫХ ПРОЦЕССОВ ЭПИТАКСИАЛЬНЫХ СЛОЕВ КРЕМНИЯ ПОСЛЕ ВОЗДЕЙСТВИЯ АТОМА ЭРБИЯ // Ilim ha’m ja’miyet. – 2025. – № 2-1. – С. 46-47. |
| MLA | Шарибаев, М.Б., and Каландарова, Ш.К. “ИЗМЕНЕНИЕ РЕЛАКСАЦИОННЫХ ПРОЦЕССОВ ЭПИТАКСИАЛЬНЫХ СЛОЕВ КРЕМНИЯ ПОСЛЕ ВОЗДЕЙСТВИЯ АТОМА ЭРБИЯ.” Ilim ha’m ja’miyet, (2-1), 46-47, 2025. https://journal.ndpi.uz/index/article/view/2025-2-1-016 |
| Chicago | Шарибаев, М.Б., and Каландарова, Ш.К. “ИЗМЕНЕНИЕ РЕЛАКСАЦИОННЫХ ПРОЦЕССОВ ЭПИТАКСИАЛЬНЫХ СЛОЕВ КРЕМНИЯ ПОСЛЕ ВОЗДЕЙСТВИЯ АТОМА ЭРБИЯ.” Ilim ha’m ja’miyet, (2-1), 46-47 (2025). https://journal.ndpi.uz/index/article/view/2025-2-1-016 |
| Harvard | Шарибаев, М.Б., and Каландарова, Ш.К (2025) ‘ИЗМЕНЕНИЕ РЕЛАКСАЦИОННЫХ ПРОЦЕССОВ ЭПИТАКСИАЛЬНЫХ СЛОЕВ КРЕМНИЯ ПОСЛЕ ВОЗДЕЙСТВИЯ АТОМА ЭРБИЯ’, Ilim ha’m ja’miyet, (2-1), 46-47. https://journal.ndpi.uz/index/article/view/2025-2-1-016 |
| BibTeX | @article{article2025,
title = {ИЗМЕНЕНИЕ РЕЛАКСАЦИОННЫХ ПРОЦЕССОВ ЭПИТАКСИАЛЬНЫХ СЛОЕВ КРЕМНИЯ ПОСЛЕ ВОЗДЕЙСТВИЯ АТОМА ЭРБИЯ},
author = {Шарибаев, М.Б. and Каландарова, Ш.К.},
journal = {Ilim ha’m ja’miyet},
year = {2025},
number = {2-1},
pages = {46-47},
url = {https://journal.ndpi.uz/index/article/view/2025-2-1-016}
} |
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