A description is given of flow velocity sensors for continuous media based on silicon with nanoclusters of nickel atoms, which possess high sensitivity and stability of output parameters. The mode of nickel diffusion into silicon for creating a flow velocity sensor of continuous media is considered. The electrophysical parameters of the sensor have been investigated.
| Mualliflar | Mannanov M.I., Маннанов М.И., Mannanov M.I. |
|---|---|
| Jurnal | Research Focus |
| Nashriyot | Ветеринария ИТИ ва “Илм-фан ва инновациялар академияси” МЧЖ |
| ISSN | 2181-3833 |
| Nashr sanasi | 2023-10-05 |
| Jild | 2 |
| Son | 9 |
| Betlar | 40-44 |
| Til | Ingliz |
| Ilmiy soha | Veterinariya |
| DOI | 10.66073/researchfocus.v2i9.445 |
| Indeksga qo‘shilgan | 2026-09-08 |
DOI: 10.66073/researchfocus.v2i9.445 · Maqolaning asl sahifasi
датчик, поток, легирование, кремний, никел, температура, диффузия, чувствительность, удельное сопротивление, sensor, flow, doping, silicon, nickel, temperature, diffusion, sensitivity, resistivity, datchik, oqim, legirlash, kremniy, nikel, harorat, diffuziya, sezgirlik, solishtirma qarshilik
| APA | Mannanov M.I., Маннанов М.И., & Mannanov M.I. (2023). THERMOANEMOMETRIC SENSOR BASED ON SI. Research Focus, 2(9), 40-44. https://doi.org/10.66073/researchfocus.v2i9.445 |
|---|---|
| GOST (OAK) | Mannanov M.I., Маннанов М.И., Mannanov M.I. THERMOANEMOMETRIC SENSOR BASED ON SI // Research Focus. – 2023. – T. 2, № 9. – P. 40-44. – DOI: 10.66073/researchfocus.v2i9.445. |
| MLA | Mannanov M.I., Маннанов М.И., and Mannanov M.I. “THERMOANEMOMETRIC SENSOR BASED ON SI.” Research Focus, 2(9), 40-44, 2023. https://doi.org/10.66073/researchfocus.v2i9.445 |
| Chicago | Mannanov M.I., Маннанов М.И., and Mannanov M.I. “THERMOANEMOMETRIC SENSOR BASED ON SI.” Research Focus, 2(9), 40-44 (2023). https://doi.org/10.66073/researchfocus.v2i9.445 |
| Harvard | Mannanov M.I., Маннанов М.И., and Mannanov M.I (2023) ‘THERMOANEMOMETRIC SENSOR BASED ON SI’, Research Focus, 2(9), 40-44. https://doi.org/10.66073/researchfocus.v2i9.445 |
| BibTeX | @article{mannanovmi2023,
title = {THERMOANEMOMETRIC SENSOR BASED ON SI},
author = {Mannanov M.I. and Маннанов М.И. and Mannanov M.I.},
journal = {Research Focus},
year = {2023},
volume = {2},
number = {9},
pages = {40-44},
doi = {10.66073/researchfocus.v2i9.445},
url = {https://doi.org/10.66073/researchfocus.v2i9.445}
} |
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